Adhesion Aspects of Thin Films by Kash L. Mittal

By Kash L. Mittal

A moment overseas symposium on adhesion points of skinny motion pictures, held in Orlando, Florida in December 2003, extended from the 1st by means of contemplating metalized plastics and adhesion size. The 17 papers that caught to the publishing method transparent to the tip reflect on such subject matters as adhesion houses of functionally gradient diamond- like carbon nano-composite motion pictures, characterizing polyethylene-metal composite skinny movies deposited by way of evaporation, the contribution of chemical reactions among aluminum atoms and varieties of sensible teams to the adhesion of aluminum-polymer structures, and serious occasions saw on copper motion pictures on glass substrate within the micro-scratch try. there's no index. VSP is a subsidiary of Brill.

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Figure 7. Polarization curves for 25 nm oxidized Zr adhesion layers. between 20-30 pClcm2, as shown in the hysteresis loops of Figs 7 and 9. The changes in the positions of the peaks for the dielectric constants, shown in Figs 6 40 0. Zohni et al. and 8, are another example of hysteresis behavior, the shift is related to the direction of the voltage sweep: first the voltage is run from -15 V to 15 V, then from Figure 8. C-V curves for 25 nm sputtered ZrO, adhesion layer swept from -15 V to 15 V and vice versa.

EXPERIMENTAL Because the applications of our research require an extended KOH etch process to create very thin membrane structures, and because thermal oxide films are not effective masks for this etching process, all test wafers incorporated an LPCVD nitride layer as shown in Fig. lb. T. Baker, Phillipsburg, NI, USA) to ensure that the nitride surface was free of particles before the adhesion layer was deposited. Next, various adhesion layers (Zr, Ta, ZrOz and Ti) were sputtered onto the nitride.

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