Adhesion Aspects in MEMS/NEMS by Seong H. Kim, Michael T. Dugger, Kash L. Mittal

By Seong H. Kim, Michael T. Dugger, Kash L. Mittal

Phenomena linked to the adhesion interplay of surfaces were a serious point of micro- and nanosystem improvement and function because the first MicroElectroMechanicalSystems(MEMS) have been fabricated. those phenomena are ubiquitous in nature and are found in all platforms, in spite of the fact that MEMS units are rather delicate to their results as a result of their small measurement and restricted actuation strength that may be Read more...

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2, which is the vapor pressure region where the capillary force is predicted to be the maximum. Figure 9 compares the capillary forces calculated from the Young–Laplace exact solution (Fig. 9(a)) and circular approximation (Fig. , both the adsorbate film and 42 D. B. Asay et al. / Adhesion Aspects in MEMS/NEMS (2010) 25–44 Figure 8. 99) of ethanol, n-propanol, n-butanol and n-pentanol calculated with (a) the Laplace–Young exact solution method and (b) the circular approximation method at point 1 as shown in Fig.

At low p/psat , the data in Fig. 1 qualitatively do not agree with this trend. This is most likely due to inter-solid adhesion forces occurring when the surface coverage of the adsorbed alcohol is less than a monolayer [29], which are not accounted for in the pure capillary model. Their origin is discussed in more detail below. 2. Circular Approximation with Pythagorean Relation By comparing the results from the exact solution to the results from the circular approximation, we can determine the degree to which the simpler latter method is valid.

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